日本真人版免费PPT,免费B站看大片真人直播,女性真人外生图片大全,真人做爰45分钟,国产看真人毛片爱做A片,成人性生交大片免费看小说

Inline equipment, which can be integrated with one or two boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically.

Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

Replace manual transportation of cassettes,all information can be intelligent interaction and resources are controlled intelligently,which realize automatic production of entire production line and intelligent management of the whole plant.